Used KLA / TENCOR 6220 Surfscan #293602408 for sale

KLA / TENCOR 6220 Surfscan is a state of the art wafer testing and metrology equipment. It is designed for a wide range of applications including defect review, lithography/etch monitoring, film measurement and overlay inspection. The system is equipped with the latest motion and imaging systems that enable it to reach high levels of precision and accuracy. KLA 6220 Surfscan features a high speed 6-axis scanning platform and is Quad-level DSP controlled for ultra-precise wafer stage movements. Its high speed scanning and wide range of motion capabilities provide superior highly repeatable scans, allowing for better yield verification. The unit incorporates KLA advanced imaging capabilities including a choice of high-resolution color cameras, each with its own field-of-view. The machine is capable of inspecting up to 6″ 10mil diepad at a 0.25micron CD accuracy and can detect defect size and shape abnormalities down to 2 microns. The tool also supports high-resolution laser beam deflection and scan line profiling with a stunning 20 μm resolution. The asset integrates Active Area Scans (AAS) to reveal high resolution yield data, double patterning and 3D defect information and has expansive capabilities for Automated Optical Inspection (AOI). It also incorporates Leading Edge Diffraction (LED), chemical identification and imaging, chemical identification without imaging (CIWI) as well as metrology capabilities for critical CDs and on critical features of 3D bar structures. TENCOR 6220 Surfscan model is modular and user configurable for flexibility and improved process uniformity. It features a variety of adaptable hardware and software options, such as flat panel displays, automated environmental control, SPC open-architecture, customized solutions and data analysis solutions. 6220 Surfscan is designed to help improve process control, as well as inspect a wide variety of semiconductor dimensions, defect levels and process parameters. It is a reliable and cost-effective way to maintain chip quality and extend device lifecycles.