Used KLA / TENCOR 6220 Surfscan #9084445 for sale
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ID: 9084445
Vintage: 1996
Inspection system
Currently installed in cleanroom
1996 vintage.
KLA / TENCOR 6220 Surfscan is a powerful, sophisticated wafer testing and metrology equipment for semiconductor device fabrication. It is capable of providing a full range of data-rich imaging, inspection, and metrology features. KLA 6220 Surfscan offers a versatile combination of optical, electrical, and acoustic inspection capabilities. It supports a wide variety of sample types in all stages of production, from prototype to production to post-test. TENCOR 6220 Surfscan system is designed for end-to-end process control, prevention of yield loss through fail detection, and quality optimization. It features high sensitivity, accurate positioning, and a diverse range of probing capabilities. The integrated imaging capabilities allow for full visual data collection and accurate recognition of a wide variety of materials at the wafer level. The unit is capable of inspecting layers as thin as 25nm and providing vital data to drive process control. 6220 Surfscan is equipped with high-precision hardware for both scanning and metrology. It uses a suite of automated tools optimized for low-angle light detection, as well as optical microscopy for higher-angle image processing. Additionally, the machine is capable of utilizing acoustic microscopy to analyze materials and defects on the micro- and nanoscale. The tool features ultra-fast scanning and wafer identification for automated throughput, as well as a wide range of data analysis and reporting capabilities. KLA / TENCOR 6220 Surfscan also offers a comprehensive suite of manual and automated testing features, with highly repeatable measurements and capabilities for error correction and correction schemes. Its flexible architecture allows for the addition of custom options to meet specific site and process requirements. KLA 6220 Surfscan is designed to meet a wide range of applications and environment requirements, and can be integrated into manufacturing environments or operated alone for classification of wafers and parts. It is specifically designed to provide accurate and reliable inspection results and process optimization for microelectronics and related industries. The asset supports a range of 48" wafer sizes (up to 8"), and is configured to meet the needs of customer-specific processes, with a wide range of options to choose from. Additionally, the model is backed by world-class technical support and support services.
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