Used KLA / TENCOR 6220 Surfscan #9103712 for sale
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KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed for precise and accurate defect detection and analysis on a variety of substrate materials. The system is capable of inspecting 200 mm, 300 mm and larger, diameter wafers with the ability to image a variety of wafer edge and topography types. The unit utilizes advanced optics and a circular scan path to generate a full range of 2D surface images with 3D imaging capability. The machine is capable of detecting non-visible defects in the wafer material and micro-structures, enabling manufacturers to identify any potential issues and initiate corrective action. The tool employs advanced image recognition and analysis algorithms to accurately detect and characterize defects. The asset is equipped with a digital camera and sophisticated analysis software, providing high resolution images for detailed defect inspection and analysis. KLA 6220 Surfscan is equipped with advanced auto-focus, edge detection and object detection capabilities, allowing for precise and repeatable measurements of device registration, outline, overlay and critical dimensions. The model enables easy review and comprehensive reporting of results, providing the manufacturer with the information they need to make the necessary process and design changes in order to maximize yield. The equipment is capable of very high throughput, increasing productivity and reducing cycle times, while yielding exceptional performance and accuracy. The system models the entire wafer profile and provides the user with a variety of capabilities, such as profiling in 1 - 20 GHz frequency ranges, providing an unmatched combination of accuracy, inspection speed and defect coverage. TENCOR 6220 Surfscan is a powerful wafer testing and metrology unit and is an integral part of a manufacturing process that is critical to the success of today's semiconductor industry. It provides precision, speed and accuracy that no other machine can match and is designed to meet the ever-increasing demands of the semiconductor market.
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