Used KLA / TENCOR 6220 Surfscan #9110913 for sale

KLA / TENCOR 6220 Surfscan is a state-of-the-art wafer testing and metrology equipment used in the semiconductor fabrication industry. The 6220 uses high-resolution optical microscopy and interferometric technologies to detect, analyze and evaluate defects on the surface of semiconductor wafers. It is the latest in the Surfscan family offering the most advanced defect detection and classification capabilities, making it an ideal tool for process optimization and quality control. The 6220 utilizes a highly sensitive, precision optical microscope, allowing for high resolution imaging of surface features on the wafer. In addition, wavelength scanning interferometry (WSI) is incorporated to measure the surface heights and gradients. The integrated system uses multi-mode metrology, providing simultaneous WSI, vector scanning interferometry (VSI), and image subtraction analysis. WSI detects the most subtle surface topography features, while VSI performs more detailed 3D measurements of the topography. Finally, the image subtraction method evaluates the different layers on the wafer, and compares two wafers after each layer is deposited. The 6220's advanced software enables users to accurately locate and identify randomly distributed defects, evaluate the surface roughness of each wafer, and classify defects according to industry standard profiles. It also supports the capability to automate the detection and classification process. The unit is capable of a wide range of measurement resolutions from 0.2nm to 20nm, providing extremely accurate and precise analysis results. In addition, the compact and modular KLA 6220 features direct scanning and imaging capabilities, allowing for a broad range of non-contact probe configurations and measurements. Its automatic, dual stage wafer translation machine ensures accurate positioning and stage control for high repeatability. The tool also offers extended dynamic range, longer battery life, a larger wafer capacity, and an improved thermal management asset, allowing for better performance and accuracy. All in all, KLA 6220 Surfscan is an ideal tool for advanced process optimization and quality control. It provides advanced defect detection and classification capabilities, supporting a wide range of measurement resolutions, offering precise, accurate results. Coupled with its compact design, modularity, and long battery life, the Surfscan 6220 is an ideal choice for semiconductor device production and research.