Used KLA / TENCOR 6220 Surfscan #9115142 for sale
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ID: 9115142
Wafer Size: 4"-8"
Unpatterned surface inspection system, 4"-8"
SMIF
Substrates: 4"-8"
Automatic wafer handler
Sensitivity most surfaces: 0.20µm @ 95%
Polished surfaces: 0.10µm @ 95%
Capture rate: 0.12µm Defect sensitivity on bare silicon
Repeatability: < 1.0%
Standard deviation
Contamination:
Less than 0.005 particles
Greater than 0.15µm
Includes:
SP1/TBI: 4 Station, single open cassette, DFIMS
SP1/DLS: 4 Station, single open cassette, DFIMS
SP2 and SP2/XP: DFIM, 12"
Haze sensitivity: 0.02 ppm
Defect map and histogram with zoom
Illumination source: 30 mW
Argon-Ion laser
Wavelength: 488 nm
2D Signal integration
Spatial resolution: 50µm
Non-contaminating robotic handler
Random access sender / receiver unit.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed for quality assurance in semiconductor manufacturing processes. With its advanced technology, the Surfscan offers features to ensure process control and product quality. The efficient Surfscan system enables fast non-destructive testing, displaying results in real time to ensure greater process control. The unit comes with a configurable integrated E-beam measurement capability that provides high accuracy shape and critical dimension measurements, enabling users to validate process control. The Surfscan has an intuitive graphical user interface that enables users to quickly and easily set up test jobs and store them for future use. The graphical machine is highly customizable, assuring users of maximum adaptability to their unique processes. The Surfscan also offers high throughput performance, with its high performance wafer-to-wafer throughputtime reducing the need for manual loading. The tool can handle wafers up to eight inches in diameter and up to two microns thick, and is also compatible with KLA patented ultra-smooth inspection technology. Additionally, the asset is designed with advanced statistical process control features, allowing the user to analyze key process variables and detect potential out-of-control conditions before significant process problems occur. KLA 6220 Surfscan is a powerful and reliable model that offers high accuracy, excellent flexibility and ease of use. With its robust and reliable product features, it is an ideal solution for quality assurance in semiconductor manufacturing processes.
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