Used KLA / TENCOR 6220 Surfscan #9137178 for sale

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ID: 9137178
Wafer Size: 6"
Vintage: 1996
Particle counter system, 6" 1996 vintage.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment used for non-destructive defect inspection and to characterize surface topography. It is designed for 300 mm wafers, and can inspect multiple wafers in parallel. The system is capable of measuring both extremely low and extremely high surface heights. It is fast, reliable, and accurate, and ideal for quality assurance and process development applications. At the heart of the unit is KLA proprietary BIB (Burst Illumination Brightfield) technology. This uses an array of tiny LEDs to emitted bursts of light that penetrate the sample wafer when useful data is required. The intensity of the scattering can then be accurately measured at every point on the wafers surface. The result is an incredible level of resolution that is several times greater than prior inspection systems. The 6220 machine is equipped with numerous other features to enhance functionality. It has two digital cameras, which provide visual images of scanned wafers. It also features a dual-axis wafer stage, which can accurately position the wafer in up to nine different directions for complex measurements. Many types of automated routines for various measurements can be programmed and executed in the tool. To enable fast wafer-to-wafer and die-to-die comparisons, the asset supports several image analysis algorithms, such as BIS mapping, particle density measurements, and sub-pixel defect classification. These image analysis algorithms enable automatic measurement or comparison of data from multiple die sites in a single measurement. Overall, KLA 6220 Surfscan is a reliable and powerful wafer testing and metrology model that is suitable for a variety of wafer processing and metrology applications, such as yield and process enhancement. With its large array of advanced features, it is an essential tool for quality assurance and process development in semiconductor industry.
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