Used KLA / TENCOR 6220 Surfscan #9160480 for sale

KLA / TENCOR 6220 Surfscan is a critical dimension metrology equipment designed for measuring the topography of wafers for the semiconductor industry. It is a fully-automated, multi-sensor wafer testing and metrology system that uses multiple sensors to create high-resolution three-dimensional (3D) images of the surface morphology of a wafer. The unit employs a high-resolution scatterometer that measures critical contact angles, as well as two patented scan heads with embedded laser and chromatic sensors that generate images of the wafer surface with up to 10 nm of resolution in the vertical and up to 5 nm in the lateral direction. The 6M and 10M sensors have an active scan length of up to 600 mm, while the 4M sensor has an active scan length of up to 400 mm. KLA 6220 Surfscan also features high-speed, low-noise electronics that enable it to acquire high-quality data in as little as 0.9 seconds. The machine integrates an intuitive user interface that offers comprehensive process control, allowing users to set up and monitor complex recipes with ease. It also incorporates advanced analytics and automated process control that enable rapid and accurate diagnosis of defects, as well as automated actions to correct and reduce defects. The tool is capable of analyzing both the top and bottom surfaces of a wafer simultaneously, providing users with a detailed view of the surface topography. TENCOR 6220 Surfscan is a cost-effective solution that provides the precision and reliability required to meet the demands of the semiconductor industry. It offers versatile, accurate and reliable wafer surface testing and metrology in both production and R&D environments, and is an invaluable asset for any advanced semiconductor manufacturing and development operations.