Used KLA / TENCOR 6220 Surfscan #9185202 for sale

KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed to provide comprehensive, automated surface analysis and yield improvement. It accurately measures surface parameters such as reflection, scattering, stress, topography, and contamination. With a 300mm module and up to 7 inspection channels, it's ideal for achieving improved yields in a variety of semiconductor production applications. The system consists of a single-beam unit with an XY stage that moves the sample in both the X and Y direction, as well as a multi-beam machine with an XY stage and a planar scanner. The single and multi-beam systems can be used for a variety of applications, from simple wafer surface inspections to complex wafer back-end process tracking. The multi-beam tool can provide quick and accurate data on a range of surface parameters such as reflection, scattering, and stress, while the single-beam asset provides more detailed, resolution-enhanced imaging of the surface microtopography. The model is built on proven scan electronics and optics, combined with advanced signal processing software. The signal processing software is powerful and reliable, allowing for the collection of highly detailed surface characteristics, accurate image analysis, and sophisticated data comparisons. The equipment offers several beam steering and illumination systems that can be used to accurately analyze and measure parameters such as topography, scattering, reflectance, particle contamination, and stress. All beam steering parameters are fully adjustable and can be stored for future reference. KLA 6220 Surfscan is a robust and reliable system that can help increase process yields and improve pattern fidelity. With its advanced signal processing software, high speed and accuracy, and outstanding imaging capabilities, it's sure to become an indispensable tool in process control and yield improvement in semiconductor production applications.