Used KLA / TENCOR 6220 Surfscan #9195861 for sale

KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment that combines the power of optical and electrical technologies to provide a comprehensive and precise approach to wafer inspection. The system is designed to monitor processes on wafers of all sizes, from 200mm to 450mm in diameter. The unit is capable of inspecting a wide range of wafer materials, including semi-conductors, gallium arsenide, and micro-electromechanical systems (MEMS). The Surfscan is designed to provide laboratory-grade precision with real-time resolution and automated measurement. It utilizes multi-spectral imaging in the 420-1000nm range, coupled with a dual-optical head (optical profilometer and microscope pair) to measure wafer topography. The machine is also equipped with specialized software for automated step height measurement, CD (critical dimensions) measurement, topography characterization, and line edge measurement. The Surfscan has an automated threshold-based die sort process for detailed defect testing, which is capable of detecting particles, defects, and other irregularities. It can also detect electrical discontinuities in addition to optical discontinuities. The tool also has a library of pre-defined defect types, enabling users to quickly identify defect types and then apply automated corrective action. The asset is also equipped with a flexible defect classification, which can be applied to customized scenarios and library settings, as well as closed-loop optimization to improve yield and throughput. The Surfscan has also been designed with a comprehensive suite of metrology tools and features, which include high dynamic range (HDR) imaging, 3D metrology, and automated line critical dimension (CD) mapping. With these tools, users have the ability to measure different areas of a wafer with high accuracy and speed. Additionally, the model is equipped with a suite of reporting tools that enable users to quickly review and analyze test results, and identify trends in order to inform process optimization. The Surfscan is highly configurable and can be adapted to meet a variety of wafer and process types. As such, the equipment is suitable for a range of wafer testing needs, from failure analysis to research and development. With its robust technical specification and comprehensive suite of metrology and defect detection capabilities, the Surfscan is well suited for both high-volume manufacturing and low-volume laboratory operations.