Used KLA / TENCOR 6220 Surfscan #9213312 for sale
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KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment that is designed to measure the electrical properties of wafers on the nanoscale, enabling precise analysis of semiconductor manufacturing processes. It is equipped with advanced optical and electrical metrology capabilities that allow it to detect surface defects, trace contaminants, and measure surface roughness and film thickness. The 6220 features a highly sensitive optics subsystem consisting of six CCD cameras. By varying the LED light source, the cameras are enabled to capture different contrasts between the sample and the sample surface. This allows the system to detect sub-micron shapes and subsurface defects that would not be detectable with traditional optical metrology methods. The cameras are also able to collect data from a full 360⁰ view of the sample surface which increases both the speed and accuracy of analysis. The 6220 also features a proprietary electrical subsystem which utilizes Automatic Cantilever Beam Measurement (ACBM) technology. This enables it to measure nanoscale variations in surface topography by detecting electrical signals with an accuracy of sub-picometers as they travel through the wafer surface. The unit is also equipped with a Multi-Tap technology which provides increased accuracy and throughput by collecting a larger range of data from each measurement point. Additionally, the 6220 includes a proprietary software package that allows users to create customized metrology programs based on their specific needs. This software package provides users with a wide range of features, such as data analysis and data visualization tools, as well as automated reporting capabilities. The software also features traceability capabilities which enable users to track the quantities and characteristics of their sample. Combined, the 6220's optical, electrical, and software capabilities enable it to accurately analyze and measure wafer substrates on the nano-scale. The advanced metrology features of the machine enable users to detect small-scale surface defects and obtain accurate measurements in a short amount of time, making it an ideal choice for semiconductor manufacturers.
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