Used KLA / TENCOR 6220 Surfscan #9222541 for sale

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ID: 9222541
Vintage: 1999
Wafer inspection system 1999 vintage.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment used in semiconductor device production. It is used to measure electrical and physical properties of the semiconductor wafer, such as surface topography, surface flatness, photomask and wafer alignment, overlay accuracy, defect size, contamination and more. The system includes: a optics module; an image processing and analysis module; a scanning stage; and a web based user interface. The Surfscan 6220 optics module utilizes a CCD camera to measure the surface profile and coefficients of the wafer. The unit provides an automated calibration routine to provide accurate results, and a built-in auto-focus feature keeps the surface in focus for accurate readings. The image processing module uses advanced image-processing algorithms to detect, classify and measure surface defects across a wafer. The automated defect detection algorithms can detect features as small as a few nanometers, and can detect particles, scratches, and more. The Surfscan 6220 scanning stage provides highly accurate scanning of the wafer. It has a 300mm x 300mm platform with a motorized Z-axis, allowing for optimal surface handling. The scanner accurately aligns the wafer with the CCD camera machine, ensuring consistent and accurate results. The web based user interface provides users with an accessible, intuitive way to interact with the tool. Users can create and store scan profiles to easily access when needed, as well as perform tasks such as calibration, run scan session, and access log and settings information. KLA Surfscan 6220 wafer testing and metrology asset provides a reliable, cost-effective way to measure and inspect semiconductor wafers. It is highly accurate, easy to use and offers an extensive set of features to deliver optimum performance.
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