Used KLA / TENCOR 6220 Surfscan #9249955 for sale

KLA / TENCOR 6220 Surfscan
ID: 9249955
Wafer particle inspection system.
KLA / TENCOR 6220 Surfscan is a versatile wafer testing and metrology equipment designed for use in advanced semiconductor fabrication processes. This system is capable of measuring physical, electrical and optical parameters of wafer components with high accuracy and reliability. The unit is equipped with various tools to analyze the surface of each wafer such as an optical profiler, voltage sensor, optical microscope, optical reflectance spectrophotometer, and atomic force microscopy (AFM). This ensures a more precise evaluation of the wafer's components with better resolution. The optical profiler enables the rapid and accurate measurement of surface features - including surface steps, particles, and non-uniformity - with extreme accuracy. It also offers a wide range of analysis capabilities, such as signal cross-correlation and fast Fourier transform (FFT) of the measured data. The voltage sensor allows the user to measure the electrical properties of the wafer's components by applying a voltage to the component and measuring the resulting current. This provides valuable data on the behavior of the device's electrical components, enabling the user to characterize their performance. The optical microscope is used to observe the minute features of the wafer's components, such as defects or contamination, with a 10x magnification. The machine's optical reflectance spectrophotometer is used to measure surface properties and defects, providing highly accurate results. An Application Specific Integrated Circuit (ASIC) can be used to test digital circuitry as part of the metrology process. Finally, the tool is equipped with an AFM, which relies on powerful force fields to measure and characterize individual features on a wafer's surface. This technology can provide detailed images of the oscillations of a wafer's surface, as well as the surface's roughness and structure. In summation, KLA 6220 Surfscan combines the latest wafer testing and metrology technologies into a single unit, allowing users to accurately and rapidly analyze the physical, electrical and optical properties of their wafer's components. Its precision and versatility make it a valuable tool in the semiconductor fabrication sector.
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