Used KLA / TENCOR 6220 Surfscan #9256450 for sale

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ID: 9256450
Vintage: 1998
Wafer inspection system 1998 vintage.
KLA / TENCOR 6220 Surfscan is a state-of-the-art wafer testing and metrology equipment used to evaluate and measure the electrical, physical, and optical characteristics of semiconductor wafers during production. The system is designed to provide sensitive, accurate, and repeatable measurements of critical parameters on silicon wafers and ICs. KLA 6220 Surfscan utilizes a laser-based non-contact optical interferometric measurement, which allows it to produce accurate measurements with repeatable resolutions of less than 0.5nm. The unit is equipped with advanced software and real-time data analysis capabilities, so that data and results can be presented in a comprehensive graphical format. The machine can also be used to make multi-parameter measurements, allowing the user to assess the overall quality of a device or wafer. The tool is capable of testing for a wide range of features, defect types, surface roughness and flatness, stress, strain, layer spacings, etch depth, tilt, and step heights. It also features a high-resolution stereoscan camera, so that it can identify and inspect surface features such as microdust, pattern defects and scratches. Additionally, the asset is equipped with non-contact optical probes that can measure capacitance, leakage, Sheet Resistivity, and resistivity values at a nanometer level of accuracy. TENCOR 6220 Surfscan can be operated in either a manual or automated mode. In the automated mode, the operator is able to set up and program custom testing sequences, so that all testing runs are completed on the same baseline settings. This helps to ensure repeatable and consistent wafer testing from run to run. The user can also set up safety parameters, which maintain safe levels of power during testing. The model is compatible with most popular semiconductor fabrication software and database programs, and can be integrated with existing wafer processing equipment. This makes it easy for existing wafer production lines to transition to 6220 Surfscan. Its intuitive and user-friendly interface allows users to quickly become proficient with the equipment, while its advanced engineering and monitoring features allow for efficient and reliable operation. KLA / TENCOR 6220 Surfscan is a highly capable wafer testing and metrology system that can accurately and reliably measure critical characteristics of silicon wafers and ICs. Its flexibility and advanced software allow it to be integrated with most popular semiconductor fabrication software, and it features intuitive and user-friendly operation that can be quickly mastered.
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