Used KLA / TENCOR 6220 Surfscan #9285089 for sale
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ID: 9285089
Wafer Size: 4"-8"
Wafer inspection system, 4"-8"
SMIF
Round / Rectangular substrates
Automatic wafer handler sensitivity: 0.20 µm at 95%
Polished surfaces: 0.10 µm at 95%
Capture rate: 0.12 µm
Repeatability: <1.0% at 1
Contamination:
<0.005 Particles / cm
>0.15 µm
Haze sensitivity: 0.02 PPM
Defect map
Histogram with zoom illumination source
Argon-ion laser: 30 mW
Wavelength: 488 nm
2D Signal integration
Spatial resolution: 50 µm
Non-contaminating robotic handler.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed to provide high-precision measurements during the manufacture of semiconductor chips. The system is composed of multiple parts, each designed to provide a specific function of the overall unit. The central part of the machine is the Infrastructure subsystem. This includes the Data Acquisition tool, Scanning Electronics, and Pre alignment stages. The Data Acquisition asset is responsible for collecting the data from the sensing probes. The Scanning Electronics generates the scan patterns and controls the motion of the wafer stage to move the wafer across the surface. Lastly, Pre-alignment stages ensure that the probes are placed over the features of interest on the wafer before any measurements begin. The Wafer Stage subsystem is responsible for moving the wafer around the pre-aligned probes and acquiring the data. It has a 3-axis actuator design which provides high accuracy positioning of the wafer. The actuator systems are designed to ensure the probes are consistently positioned in relation to the features of interest. The Image Processing subsystem is responsible for analyzing the data collected by the probes. It provides real-time data processing capabilities, as well as advanced image processing algorithms to accurately detect defects and features of interest. The model also includes several post-processing filters to ensure the data is free from noise and artifacts. The Analysis and Reporting subsystem allows for the real-time processing of the images. It includes algorithms to detect topography patterns, roughness measurements, and other parameters. The Analysis and Reporting subsystem can also provide statistical analysis of the data, as well as generate report documents. KLA 6220 Surfscan is a revolutionary equipment designed to provide a wide range of wafer testing and metrology capabilities. By providing a comprehensive solution to semiconductor wafer testing and metrology, the system increases the accuracy and efficiency of the manufacturing process. The unit is also designed to maximize uptime and throughput of the wafer testing processes.
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