Used KLA / TENCOR 6220 Surfscan #9371741 for sale

KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed to provide high resolution 2-D metrology and defect inspection. It is capable of performing a comprehensive range of measurements on bare and patterned wafers for precision alignment and contamination detection. The system comprises an integrated wafer-handling subsystem, scan head module, and a tactile surface imaging software package. The wafer handling subsystem is designed to provide precise motion control of the wafer surface against the optics of the SurfScan. It is also capable of performing automated feeding and movement of the wafers onto the work surface. The scan head module consists of a CCD camera, laser source and a stepper motor equipped optical unit, that can scan the wafer as it is moved across the work surface. This allows the machine to acquire images of the wafer for analysis. The CCD camera has a resolution of 1000 nm and is capable of acquiring images with a field of view up to 34 mm. The laser source has a wavelength of 1060 nm and a power output of 200 W. The stepper motor is capable of achieving sub-micron precision in stages of 650 x 650 nm, allowing for high-resolution images. The SurfScan also includes a tactile surface imaging software package that is capable of extracting both surface and subsurface information from the acquired images. This is done by measuring the surface roughness and defect topography, wafer flatness and bow, as well as surface contamination. The software package also includes various tools for performing defect inspection, processing and analysis. In addition, the tool is capable of capturing images in both brightfield and darkfield illumination. This allows the asset to detect a wide range of defects such as chips, scratches, particles, edge chipping and pits. The model is compliant with industry standards including SEMI 300-02 and MIL-STD-883. KLA 6220 Surfscan is an advanced wafer testing and metrology equipment that enables efficient and accurate inspection, testing and analysis of wafers. With its high resolution, precision alignment and defect detection capabilities, the system is capable of providing rapid and accurate analysis of various types of wafer samples.