Used KLA / TENCOR 6400 Surfscan #192510 for sale

KLA / TENCOR 6400 Surfscan
ID: 192510
Patterned / Non-patterned darkfield defect inspection system.
KLA / TENCOR 6400 Surfscan Equipment is a high precision wafer testing and metrology system used in a wide variety of wafer-based applications such as semiconductors, MEMS, photonics, and solar cells. The unit is capable of testing for features as small as 0.2 µm up to 50 cm in size and is designed to measure a variety of features including steps, flats, edges, topographies, etching, deposition, corrosion, and more. KLA 6400 Surfscan machine utilizes three major components to survey and analyze test specimens: a sensor, monitor, and stage. The sensor is a high-resolution interferometer that allows for types of measurements that cannot be made with a standard microscope. The monitor provides a graphical display of the sample as the interferometer scans across it. The stage is a motorized, programmable platform which is able to tilt, rotate, and shift the sample surface to meet specific testing requirements. The tool also includes a software package that allows users to design automated setups for customization and repeatability. This software allows the user to select the testing parameters and the type of images and data that is to be collected. The program also has built-in security features that allow the user to protect their testing results from unauthorized access. The asset is built for extreme accuracy and repeatability and comes with an integrated environmental safety model which keeps temperature, humidity, vibration, and other environmental factors at a constant level in order to maintain consistent results in even the most challenging production environments. The equipment also features a wide range of calibration capabilities and enables the user to manually calibrate each parameter individually, enabling them to set up specific parameters that match the exact requirements of their tests. Overall, TENCOR 6400 Surfscan System is an effective and reliable unit designed for precision wafer testing and metrology. Its combination of advanced hardware, software, security, and calibration capabilities make it an ideal choice for any environment where accurate and repeatable testing is essential.
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