Used KLA / TENCOR 6400 Surfscan #9155219 for sale

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ID: 9155219
Wafer inspection system Single phase, 60 Hz 17 Amps, 208 V 1994 vintage.
KLA / TENCOR 6400 Surfscan is a high-precision tool for measuring the surface of wafers. It utilizes a patented Interferometric Non-Contact profilometer (INC) to measure surface features on the wafers, such as topographical and dimensional information. The INC is a its state-of-the-art Technology for Quickly and Accurately measuring nanometer Defects. KLA 6400 Surfscan is designed to work on high-volume production lines. It uses a high-speed, dual-zone scan equipment to increase throughput and reduce retest time. The dual-zone system has a 7µm detector designed to detect early defects on a wafer and a 1µm detector designed to measure more precise surface features. It is capable of scanning a wafer at 300mm/min, with data captured at 200 datapoints per mm. TENCOR 6400 Surfscan also features multiple metrology tools. These include a high-speed particle metrology unit, a low-contrast particle metrology machine, a topography metrology tool, a 3D surface metrology asset, and a roughness metrology model. All of these systems can measure various types of wafers, including quartz, aluminum, and plastic wafers. 6400 Surfscan also has a number of other features. It is designed with an automated calibration and alignment equipment that ensures perfect alignment of upper and lower surfaces. It also has an ER-2000 Advanced Processing System, which allows for data analysis and control of the data collected by KLA / TENCOR 6400 Surfscan. KLA 6400 Surfscan is packed with features that make wafer testing and metrology easier and faster. It is the ideal tool for semiconductor companies that need an accurate and efficient tool for wafer testing and metrology. With its accuracy and features, TENCOR 6400 Surfscan is a highly reliable tool that can be used to measure surface features with ease and precision.
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