Used KLA / TENCOR 6400 Surfscan #9179617 for sale

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KLA / TENCOR 6400 Surfscan
Sold
ID: 9179617
Vintage: 1995
Particle inspection system 1995 vintage.
KLA / TENCOR 6400 Surfscan is an advanced wafer testing and metrology system designed to provide manufacturers and service providers with a powerful and accurate analysis of wafer fabrication. The product is specifically designed for wafer processing within the semiconductor, microelectronics, and optoelectronics industries. KLA 6400 Surfscan is capable of executing high-speed, high-accuracy 2D and 3D metrology measurements, which is critical for ensuring the accuracy and efficiency of critical fabrication processes. TENCOR 6400 Surfscan offers a wide range of capabilities such as wafer flatness, process non-uniformity, layer shear, and feature profile metrology. It is equipped with a dozen advanced optical and imaging subsystems, all of which work together to accurately measure features on the wafer. The advanced laser scanner is able to acquire features as small as 0.015 microns in size. The Surfscan is capable of measuring at a wide variety of wafer sizes, from 150 mm to 300mm. It is also able to be adapted to meet different requirements, such as a parallel detection system for rapid metrology processing. The 6400 is connected to an advanced software suite and industrial PC, allowing for quick and easy downloading and set-up of data. Advanced inspection features include critical dimension (CD), overlay measurement, and tilt & twist analysis. The 6400 is equipped with high resolution heaters for controlling temperature on the wafer, ensuring repeatable and accurate measurements across all sizes. Recent advancements also allow the 6400 to detect defects down to the micron level - a significant improvement over previous generation product. In general, 6400 Surfscan is an ideal solution for the modern manufacturing and service provider looking for a complete and accurate wafer evaluation system. Its advanced feature set, high accuracy, and comprehensive software suite make it an optimal choice for any fabrication process that requires precise measurements.
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