Used KLA / TENCOR 6400 Surfscan #9180164 for sale

KLA / TENCOR 6400 Surfscan is an advanced wafer testing and metrology system that is designed to measure, qualify, and debug wafer processes in the semiconductor industry. It is a multi-functional tool for both horizontal and vertical applications, as well as for both front and back surface imaging. The standard version of Surfscan 6400 comes equipped with a variety of metrology capabilities, all designed to enhance yield on production wafers as well as enhance quality. This includes optical scatterometry for measuring surface topography and feature shape, as well as three-dimensional optical interferometry for measuring thin-film thickness and variation over time. In addition, the optical scatterometry features a vertical scanner and a high-resolution camera which can be used to identify and characterize a variety of surface defects. Surfscan 6400 also offers a variety of automated reporting features that can help reduce analysis time and increase productivity. These reports can be used to compare wafers with specified criteria and provide a comprehensive "health map" for a production lot. Advanced automated review software can also be used to speed up the review process of scatterometry and interferometry inspection data, which can dramatically reduce setup time and confusion. Surfscan 6400 features several new enhancements which extend the performance of wafer metrology. These include dual-light scatterometry which measures both surface topography and incident angle variation simultaneously; wet etch profiling, used to measure barrier layers and other etch process parameters; prism profiling, which can measure layer thicknesses in transparent dielectrics; and a smart-module design offering higher throughput from a smaller footprint. Surfscan 6400 also offers the ability to customize the tool set-up to accommodate multiple substrate formats, such as bump inspection, step height inspection, and profile scan. It also boasts superior scan speed and low setup time, all while enabling users to accurately and efficiently identify process issues in a fraction of the time. Overall, KLA 6400 Surfscan is an excellent wafer testing and metrology system that provides high-speed, reliable data and advanced customization capabilities for a wide range of applications. This allows users to quickly and accurately diagnose process issues to improve wafer performance and reduce downtime.