Used KLA / TENCOR 6400 Surfscan #9202541 for sale

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KLA / TENCOR 6400 Surfscan
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ID: 9202541
Defect inspection system.
KLA / TENCOR 6400 Surfscan is a wafer testing and metrology equipment designed for its versatility in a wide range of metrology applications. This powerful system was designed to take high-resolution images of wafers, providing engineers with an in-depth, detailed analysis of its surface. KLA 6400 Surfscan allows for simultaneous testing of several different types of test applications, such as roughness, thickness measurement, surface defects, particulate contamination and surface topography. This unit uses automatic focus and stage corrections to ensure accurate repeatable measurements in each wafer test. The 6400 has a 10x optical machine that can inspect up to large 915 mm wafers with a resolution down to 1 micron. It also has an adjustable 3D focus mechanism to improve automated focus. The 6400 has an integrated vision sensing tool and a high-speed wafer handler which can autonomously perform defect analysis, pattern recognition, and other measurements which require automated inspection. It also has a variety of image adjustment and enhancement features, such as various detection algorithms, spectrum analysis, feature extraction, auto-correlation and a range of post-processing tools. The asset is equipped with a fully integrated defect management database, which can store defect data, helping with analysis and defect debugging. It can also analyze multiple data sets from each wafer, including multiple cross sections, providing a comprehensive look at the sample. TENCOR 6400 Surfscan is one of the most advanced metrology systems on the market. It is specially designed for wafer metrology and offers unparalleled reliability and flexibility in its testing. This model is ideal for wafer manufacturers, as it allows them to test their products at a more efficient rate, with accurate results, while still maintaining a high level of safety. 6400 Surfscan is an invaluable tool in the field of wafer testing, providing engineers with detailed and reliable data.
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