Used KLA / TENCOR 6400 Surfscan #9257968 for sale

KLA / TENCOR 6400 Surfscan is a powerful wafer testing and metrology equipment used to achieve high yield and productivity in the fabrication of semiconductor devices. This state-of-the-art instrument is equipped with a proprietary optical design that provides superior optical performance in a wide variety of applications. The 6400 includes top cameras with LED illumination, a high-resolution X-Y motorized stage, and a full suite of specialized software modules, all housed in a streamlined layout. The main features of KLA 6400 Surfscan system include an AutoFocus unit, a Fast Scan feature, 16-bit signal processing, and automated self-centering for optimal alignment. The AutoFocus machine utilizes piezo transducers to monitor the laser spot position and continuously refocus the beam for optimal image quality. It also reduces adverse effects from sample or stage movement. The Fast Scan feature operates at scan speeds up to 500 times faster than conventional systems, tracking the surface of a wafer in real-time to measure the entire wafer surface in a fraction of the usual time. The 16-bit signal processing offers superior measurement accuracy over 14-bit systems. Automated self-centering reduces the setup time for each measurement job by automatically centering a wafer as its position is shifted or rotated in any direction. TENCOR 6400 Surfscan also includes a FlexFocus capability for high-throughput measurements on wafers of different thickness and non-circular substrates. The FlexFocus module provides precise automatic focal plane alignment for each and every substrate, eliminating manual adjustments for changing wafer thickness. Additionally, 6400 Surfscan also includes the Advanced Feature Extraction Tool, or AFT, which is an image analysis package optimized for defect inspection and circuit level measurements. It enables automated extraction of defective features from complex features, allowing quick and efficient identification of defects. Overall, KLA / TENCOR 6400 Surfscan is a versatile wafer testing and metrology tool designed for high throughput measurements, precise feature alignment, and powerful image analysis capabilities. It is an ideal instrument for companies looking to quickly and accurately analyze and inspect any type of wafer.