Used KLA / TENCOR 6400 Surfscan #9358232 for sale

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ID: 9358232
Defect inspection system CPU Laser monitor.
KLA / TENCOR 6400 Surfscan is a wafer testing and metrology equipment that is used to evaluate the quality and perform a variety of automated tests on integrated circuit surfaces. This system is designed to provide maximum compatibility with a wide range of materials, formats, and device types. KLA 6400 Surfscan unit from KLA offers three primary operation modes: "active scanning", "standby monitoring" and "laser silent". Active scanning mode is used to provide detailed information about surface defects, while "standby monitoring" is used for ongoing background testing, providing optimal inspection throughput in all wafer content and device sizes. The laser silent mode is used for extended testing periods without the need to maintain a continuous laser beam. The machine features a wide variety of metrology capabilities in defect location and review, surface topography, and advanced pattern analysis. Its "pattern filters", a suite of software tools, are designed to take advantage of the tool's large resolution scans, resulting in high defect detection sensitivity and the ability to refine defect counts. TENCOR 6400 Surfscan also features a wide variety of imaging algorithms. These algorithms combine to perform highly accurate topography measurements and image analysis, thus providing a powerful tool for evaluating surface characteristics. The asset also offers advanced tracking capabilities that allow users to view measurements of individual defects and their positions as part of an overall "trend" analysis. Automated calibration routines are embedded within the model to ensure fast, reliable, and repeatable measurements. 6400 Surfscan is a very reliable equipment, featuring a mechanically advanced laser-shock-protection (LSP) system and a precision-stabilized microscope stage. This unit is reported to easily handle a wide range of substrates, from 2 inch round to 12.5 inch square, and offers a wide dynamic range of measurements, from the nanoscale level to the micron level. Overall, KLA / TENCOR 6400 Surfscan is a versatile and powerful wafer testing and metrology machine that is designed for maximum compatibility and accuracy. It offers a variety of imaging and measuring capabilities, as well as precision-stabilized stages and an advanced LSP tool for accuracy and reliability.
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