Used KLA / TENCOR 6420 #293609510 for sale

KLA / TENCOR 6420 is a next generation wafer testing and metrology equipment designed to provide full non-contact dimensionality inspection over the entire wafer surface with improved accuracy. The system is optimized for high-volume production performance and supports the latest wafer diameters. It features a proprietary, calibrated imaging detector that provides true in-line topographic imaging, enabling highly accurate process yield analysis. KLA 6420 is manufactured with a modular design that simplifies installation and maintenance. It features a robust, single-side access platform that reduces footprint requirements compared to traditional double-side access systems. The optional AC motorized stages ensure superior dynamic alignment and allow for higher accelerations and faster throughput. The stages feature an advanced optical encoder unit and a nanometer resolution, providing highly precise and reproducible alignment and measurement values throughout the wafer. TENCOR 6420 also incorporates a high-efficiency imaging machine, which includes advanced smart sensor front-end and digital signal processing. This enables fast, accurate, full-field image capture with resolution down to a sub-micron level. The imaging tool provides dual simultaneous alignment, allowing the user to map full wafer surface to the pixel level without waiting for one map to finish forming. To further maximize measurement accuracy and yield, 6420 utilizes a proprietary in-situ optical metrology technique called AugerScan™, which uses auger electrons to detect surface features in three dimensions. AugerScan technology is also used to determine process yield with repeatability to better than 0.01 ppm. Combined with its advanced image processing, this asset enables superior process characterization and fault analysis. The 6520 is equipped with a suite of advanced software tools for data storage and processing. It offers detailed measurement reviews, complete with graphical displays and comprehensive analytics for comprehensive yield management. The model also provides full remote access from any networked PC, allowing users to monitor measurement values and performance data from any location. KLA / TENCOR 6420 is an ideal solution for semiconductor manufacturers and facilities looking for a reliable, high-performance equipment for testing and metrology. With its advanced imaging and sensing capabilities, high precision, and repeatable measurements, this system offers fast and dependable process yield analysis and defect identification. Overall, KLA 6420 is an ideal unit for wafer testing and metrology needs.