Used KLA / TENCOR 7200 Surfscan #293626871 for sale

ID: 293626871
Vintage: 1990
Wafer inspection system 1990 vintage.
KLA / TENCOR 7200 Surfscan is a wafer testing and metrology equipment designed to inspect semiconductor wafers for defects with unparalleled accuracy and resolution. This system employs advanced laser and optical technologies to ensure highest grade measurements. KLA 7200 Surfscan utilizes three broad categories of technologies to obtain precise metrology: laser scanning, imaging, and interferometry. Its laser scan measurement capability uses optical time of flight and laser scanning microscopy to accurately measure height, surface tilt, and other characteristics of device topography with a resolution of 2.5 nanometers. Its imaging feature uses both high-resolution reflective microscopy and dark-field imaging to detect defects at the nanometer scale. Its interferometry technique measures the deviation between measured interference fringes and theoretical fringes created by a reference wafer, which will detect any subtle deviations in the device profile. TENCOR 7200 Surfscan is a robust wafer defect analyzer, offering high speed data acquisition speeds of up to 1,200 wafers per hour for large area mapping and defect detection. It also carries a low power distribution (2.6 kW) and environmental stability from calibration temperatures of 30ºC to 80ºC. 7200 Surfscan's intuitive user interface makes it easy to configure, analyze, and compare test results. The unit is ideal for validating the quality of a device or the effectiveness of process improvement, as well as for process control, including on-line yield management, process quality assurance, and product selection. KLA / TENCOR 7200 Surfscan is capable of delivering very detailed quality assurance information, detecting both gross and subtle features of device film, such as sub-surface defects and non-uniformity in optoelectronic devices. The machine supports both print and interactive analysis, allowing the user to quickly identify and resolve production issues. KLA 7200 Surfscan offers a single package for medium-to-high volume testing and metrology. Its laser scanning capabilities enable it to measure and detect device properties more efficiently than traditional optical methods. It is a cost-effective option for reliable process control and device verification, with a focus on defect analysis.
There are no reviews yet