Used KLA / TENCOR 7600 Surfscan #293658685 for sale
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ID: 293658685
Wafer Size: 6"
Vintage: 1995
Wafer inspection system, 6"
Blower
1995 vintage.
KLA / TENCOR 7600 Surfscan is a premier wafer testing and metrology equipment specifically designed to meet the needs of the semiconductor industry. KLA 7600 Surfscan is equipped with industry leading systems, such as an advanced optical system, for high-resolution wafer inspection, 3D depth measurement, and lithographic control of the semiconductor production process. The advanced optical unit in TENCOR 7600 Surfscan has an NA of 0.35 and a large field of view (FOV) of up to 4mm. This makes it possible to detect defects with high resolution and accuracy, even at higher wafer speeds. In addition, the optical machine can be combined with an integrated laser interferometer for high accuracy 3D non-contact metrology. This allows for comprehensive metrology of the wafer, such as topography, defect heights and wafer flatness measurements.7600 Surfscan also supports automated defect detection, recognition, and classification using KLA proprietary HS-PS technology. This technology utilizes pattern recognition algorithms to distinguish between particles, etching anomalies, structural and sub-surface defects. KLA / TENCOR 7600 Surfscan's metrology tool has been designed to provide maximum accuracy and repeatability. It utilizes a high resolution RGB detector, adjustable beam angle, and high contrast color filters to perform a range of sophisticated wafer measurements and analysis. This asset is also capable of detecting multiple layers and defect types, including voids, pits, protrusions, depth variations, and gradients. KLA 7600 Surfscan offers exceptional uptime and fast turnaround times for wafer processing. It has been designed with state-of-the-art technology, including a high-precision wafer handling model, control components, software, and a powerful automation platform. It can inspect wafers up to 200mm in diameter and can process up to 8 wafers per hour. Overall, TENCOR 7600 Surfscan is a highly advanced tool for wafer testing and metrology. With its specialized optical equipment and integrated laser interferometer, it offers superior defect detection, 3D non-contact metrology, and automated defect classification. 7600 Surfscan is an invaluable tool for semiconductor manufacturers who need accuracy and reliability for their production processes.
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