Used KLA / TENCOR 7600 Surfscan #293662763 for sale

ID: 293662763
Wafer Size: 8"
Wafer inspection system, 8".
KLA / TENCOR 7600 Surfscan is a state-of-the-art wafer testing and metrology equipment used for probing and surface characterization of wafers and dielectric surfaces. It is based on proprietary interferometric technologies which enable the system to accurately assess the topographical characteristics of the surfaces such as surface flatness, particle counts, and critical dimension measurements. KLA 7600 Surfscan is designed for process control and in-line inspection in a typical semiconductor manufacturing environment. It features low power consumption and can be deployed in a wide range of applications for the measurement of wafer surface topology and defects. The instrument works in non-contact mode, enabling it to probe and image various dielectric surfaces. Its high-precision topography measurements can detect microscopic variations in surface characteristics such as step heights, overhang, trenches, and grooves. The unit is equipped with advanced analytical tools which facilitate the determination of critical defect characteristics such as particle size and distribution, line width, and reduced surface roughness. It also boasts integrated reporting capabilities which allow for easy comparison of processes over time and between multiple wafers. In addition, TENCOR 7600 Surfscan can be connected to other process control systems such as thermal-oxide measurement systems, enabling users to integrate the measurement process into a larger process-control workflow. The instrument includes a high-resolution CCD/CMOS sensor with 0.45µm resolution. This ensures the highest level of precision and repeatability for surface analysis. It also utilizes digital signal processing and 12-bit or higher resolution to deliver superior drift stability and performance. 7600 Surfscan features automated scanning capabilities which enable users to quickly and easily process multiple wafers. This is especially useful in production applications where a large number of wafers must be analyzed quickly and in accordance with industry standards. KLA / TENCOR 7600 Surfscan is a reliable and easy-to-use wafer testing and metrology machine which provides users with industry-leading measurement accuracy and repeatability. Its advanced features and capabilities ensure that process control and in-line testing is performed quickly and efficiently, ensuring high levels of device yield and quality.
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