Used KLA / TENCOR 7600 Surfscan #293747974 for sale

KLA / TENCOR 7600 Surfscan
ID: 293747974
Patterned wafer inspection systems.
KLA / TENCOR 7600 Surfscan machine is a sophisticated wafer testing and metrology equipment. Specifically designed for semiconductor production, this machine provides high resolution non-contact 2D mapping inspections that can detect and analyze potential defects on semiconductor wafers at sub-micron level. The machine utilizes advanced optical character recognition (OCR) technology to detect various wafer surfaces. The system offers features such as high throughput, high-resolution inspection, high-accuracy defect recognition, wide field-of-view, short cycle time, and a user-friendly Windows NT environment. In operation, KLA 7600 Surfscan unit begins with a pick-and-place robot acquiring wafers from the input cassette and positioning it on the wafer-handling station. The wafer is then inspected by a smart-stigmator alignment tunnel, which precisely measures the surface topography to determine the exact placement of the wafers onto the testing plate. An air slide then moves the wafer into the measurement plane for machine inspection. High-sensitivity, low-noise optical detectors are employed to detect and measure wafer defects on the sub-micron scale. The machine's advanced OCR technology and built-in algorithms provide excellent detection accuracy and precisely differentiate between critical and non-critical defects. Defects that are found to be too small or complex for detection can be marked and further reviewed in a "toolbox". High-resolution imaging is performed by the tool's four high-speed line-of-sight scan heads. The scan heads are capable of providing up to four lines of data with up to 50nm vertical resolution. These scan heads can track the wafer's surface at up to 6.5kHz scan rate. Finally, TENCOR 7600 Surfscan is equipped with intuitive software that allows the viewing of test results in simple graphical display. All measured data is stored onsite and is available for export or transfer. 7600 Surfscan is an efficient and reliable wafer testing and metrology asset. Its combination of advanced inspection technology and intuitive user interface makes it an excellent choice for any semiconductor wafer production operations.
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