Used KLA / TENCOR 7600M Surfscan #293626880 for sale

ID: 293626880
Vintage: 1994
Inspection system 1994 vintage.
KLA / TENCOR 7600M Surfscan is a leading wafer testing and metrology equipment designed for a variety of applications in the semiconductor industry. It can measure, analyze and inspect a wide range of attributes on semiconductor wafers including topography, roughness, defectivity, overlay and critical dimension (CD). The system provides a full range of software and hardware capabilities, including high-resolution imaging, automated image analysis and detailed defect listing, to enable users to make fast and accurate decisions in wafer process control. The main components of KLA 7600M Surfscan are the unit control module (SCM), the test head, vision units and the motion machine. The SCM is comprised of the software and hardware components used to control the tool. It can be interfaced with external test systems and data processing systems, enabling users to transfer and archive test results. The test head is the hardware component responsible for imaging and detecting defects on the semiconductor wafer. It operates with two cameras to allow both contact and non-contact imaging. The vision units are used to improve the resolution of the low-magnification images, and for pattern recognition and defect detection. The motion asset provides positioning and controlling of the wafer surface to enable accurate imaging. TENCOR 7600M Surfscan is capable of analyzing wafers made from materials such as silicon, glass and various polymer surfaces. Its unique imaging technology, image stitching capabilities and intensity calibration enable users to achieve superior precision and accuracy with no operator intervention. This model features several advanced applications for defect detection and control, including classifier-based defect detection for efficient sorting and a feature recognition module for identifying critical process parameters. It also has a range of quality inspection configuration tools to customize tests to fit specific customer requirements. Furthermore, the equipment is equipped with a variety of safety measuring functions and environmental protective features. 7600M Surfscan is a reliable and versatile wafer testing and metrology system that provides highly accurate results in a wide range of applications. Its advanced and efficient unit components, such as the SCM, test head, vision units and motion machine, combine to provide a comprehensive and accurate solution for wafer process control. With this tool, users can achieve superior precision and accuracy, automate wafer testing process and reduce costs.
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