Used KLA / TENCOR 7600M Surfscan #293639668 for sale

ID: 293639668
Wafer Size: 8"
Inspection system, 8" Upgraded from SFS7500.
KLA / TENCOR 7600M Surfscan is a state-of-the-art wafer testing and metrology equipment designed for semiconductor wafer production. It is designed to help semiconductor manufacturers increase their overall yield and product quality by providing more accurate and complete measurements of the wafer surface, including the physical and chemical properties of the materials deposited on it. The Surfscan 7600M has two main components: an advanced wafer-level imaging system and an advanced metrology subsystem. Its wafer-level imaging unit is capable of capturing images at a resolution of 5 microns and detecting particles and defects down to 1 nanometer. It can also read and analyze a wide range of wafer surface features such as grain size, surface roughness and contamination levels. The advanced metrology subsystem of the Surfscan 7600M includes an advanced interferometry module, a Broadband Ellipsometry machine, and a Die-to-Wafer scanning station. The interferometry module can measure the topography of a sample in three dimensions with a resolution of 0.25 nanometers. The Broadband Ellipsometry tool can measure the optical properties of a sample with a resolution of 0.5 nanometers, and the Die-to-Wafer scanning station can measure the size, shape and orientation of a sample with an accuracy down to 0.1 nanometer. The Surfscan 7600M also has a number of advanced features that make it easy to use and integrate into a modern semiconductor fabrication line. It is equipped with an automated alignment asset that aligns the wafer to the model for accurate measurements. It also features an advanced wafer recognition equipment that can detect and recognize up to 24 different kinds of wafers. Finally, it comes with a complete suite of software to provide customized analysis, data management and reporting capabilities. In sum, KLA 7600M Surfscan is an advanced wafer testing and metrology system that provides semiconductor manufacturers with reliable and accurate wafer surface measurements. Its cutting-edge imaging and metrology capabilities, combined with a range of advanced features, make it an invaluable tool for improved wafer yield and product quality.
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