Used KLA / TENCOR 7600M Surfscan #9265522 for sale

KLA / TENCOR 7600M Surfscan
ID: 9265522
Wafer Size: 6"-8"
Inspection system, 6"-8".
KLA / TENCOR 7600M Surfscan equipment is a leading-edge wafer testing and metrology system suitable for production-level use. It is equipped with advanced multi-zone patterned image sensing technology, providing high throughput and accurate results. This unit addresses the essential process control needs of the semiconductor manufacturing, flat panel display, and optoelectronic device industries. The design of KLA 7600M Surfscan features a very user friendly interface which allows for easy and fast wafer testing and metrology operations. The machine is equipped with a dual laser patterned image sensing module which ensures precise determination of defect location, size, shape, and other features. It also incorporates a standard automated optical autofocus capability, as well as a tri-dimensional relief tool for capturing ultra-high resolution images of complex features on wafers. TENCOR 7600M Surfscan is designed to handle a wide range of wafers up to 8" diameter, and is outfitted with an alignment asset which includes dedicated thick and thin wafer sensors, a single element and multi-element focus model, plus a galvanometer which facilitates fast scanning of the wafer's surface. Additionally, this equipment has the capability of scanning up to 8 wafers at one time, resulting in increased throughput. The system includes a built-in defect review station with dedicated software for manual review of a wide variety of defect types. It also offers an optional unit architecture for quick setup and reprocessing of failed wafers. This ensures the wafers are not re-processed if their defects cannot be immediately corrected. Furthermore, its embedded metrology software is capable of performing precise non-contact wafer surface measurements. In summary, 7600M Surfscan is a wafer testing and metrology machine which offers a comprehensive suite of features allowing for accurate and fast wafer testing and metrology operations, including defect review and metrology software for manual and automated inspection. With its powerful patterned image sensing module, automated optics, and other features, this tool ensures high throughput and reliable results.
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