Used KLA / TENCOR 7700 Surfscan #293636821 for sale

ID: 293636821
Vintage: 1997
Wafer inspection system 1997 vintage.
KLA / TENCOR 7700 Surfscan is a leading-edge wafer testing and metrology equipment for the most advanced semiconductor technology nodes. It provides fast and reliable measurements allowing for improved process control and optimization of device performance. It is designed with a high-precision optically-based multi-sensor architecture that enables it to accurately measure a large range of critical device parameters. KLA 7700 Surfscan is equipped with an environment-controlled, non-contact, near-field optical microscope (NFOM) head to allow quick, reliable and repeatable analytical measurements of the most crucial device parameters with minimal user intervention. TENCOR 7700 Surfscan allows the user to measure across a wide variety of device types including planar, SOI, advanced resistors, minority carrier devices, deep trench MOSFETs, finFETs and high-performance transistors. It provides superior accuracy for measurement of device parameters such as 2D overlay, critical dimension (CD) and profile, line-edge roughness (LER), and electrical properties such as threshold voltage, carrier mobility, as well as dielectric, optical, and damping characteristics. 7700 Surfscan utilizes a unique multi-sensor architecture that combines probes, data conversion and multiplexing, zoom and focus control, a scanning actuator, NFOM optics, and illuminators for color imaging. This multi-sensor architecture allows for extremely fast device characterization and data acquisition. Additionally, a software suite enables the user to control, monitor and analyze the data collected by the system in either a manual or automatic manner. At the heart of KLA / TENCOR 7700 Surfscan is a robust scanning actuator that is capable of measuring both planar and complex devices with high precision at extremely high speed. The scanning actuator utilizes powerful computer algorithms to precisely guide the measurement devices over the sample even under the most challenging conditions. This, combined with the bi-directional data acquisition unit, ensures that all relevant information is accurately captured on the sample. The machine is capable of accommodating a wide array of optimization needs, due to its robust and flexible modular architecture, as well as its high level of consistency and repeatability in data collection and interpretation. This flexibility improves the process of identifying and correcting any issues in the semiconductor manufacturing process in order to maximize product reliability and optimize process performance. KLA 7700 Surfscan is the perfect tool for any manufacturer that requires fast and reliable measurements in order to optimize their manufacturing process. It provides superior accuracy for measurement of a wide variety of device parameters and its multi-sensor architecture combined with its flexible modular architecture enables the tool to accommodate almost any optimization needs. TENCOR 7700 Surfscan makes it easier than ever to ensure that your products perform as expected every time.
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