Used KLA / TENCOR 7700 Surfscan #293655833 for sale

KLA / TENCOR 7700 Surfscan is a wafer testing and metrology equipment used for characterizing semiconductor wafers. It provides scanning electron microscopy (SEM) with secondary electrons and back scatters to sense topography, and scanning AC and DC current systems for electrical evaluation and defect diagnosis. The SEM system includes the 7700ES Rapid Scanner for high throughput, low-dose mapping; the 7700FS Fine Scanner for precise, high-resolution measurements; and the 7700SD Scanning Capacitance Microscope (SCM) for local capacitance measurements. The AC/DC unit includes the AC/DC Measurement Channels for high-performance electrical measurements, and the AC/DC Analysis Machine for analyzing data sets. The tool is particularly suitable for advanced node applications with minimum CDs of 65nm or less. KLA 7700 Surfscan can provide superior measurement reliability and performance at a low cost. The AC/DC asset uses a frequency-domain algorithm which allows it to measure ultra-high-speed devices, detecting and characterizing critical defects which can be missed by other systems. The ES and FS scanners have fast scanning speeds and a high dynamic range enabling accurate measurements and defect characterization of 3D topography and phase change structures. The SD SCM's integrated controller and 16-bit A/D converter provide signal sampling and measurement accuracy to 100 nanometers. TENCOR 7700 Surfscan also offers a powerful software suite for analyzing and visualizing the data. The Surfview TSR software enables users to quickly, easily, and accurately analyze data and view the die-by-die test results. The FASt review software provides tool preconfiguration and defaults, enabling operators to perform automatic setup for specific applications. The Smart review software is a Windows-based application provides a user-friendly environment for quickly finding defects on large number of wafers. In summary, 7700 Surfscan is an advanced wafer testing and metrology model that is capable of providing excellent measurement reliability and performance. Its versatile suite of instruments and software makes it an ideal choice for advanced node applications.