Used KLA / TENCOR 7700 Surfscan #293747975 for sale

KLA / TENCOR 7700 Surfscan
ID: 293747975
Particle inspection systems.
KLA / TENCOR 7700 is a fully automated wafer testing and metrology equipment. The system is capable of handling 8-inch and 12-inch wafers and is used to measure electrical and optical properties on wafers, ICs, and MEMS. The unit utilizes a integrated microscope, optical digitizer, imaging systems, and user-programmable robotic stages to measure various features within a single environment. KLA 7700 features a 3.4 nanometer resolution for optical measurements and its wide range of sensors for different imaging techniques, making it ideal for device characterisation, fault finding and failure analysis. TENCOR 7700's imaging optics include brightfield, darkfield, polarization and fluorescence capabilities. The tool also provides extensive metrology capabilities such as surface roughness analysis, line width measurements, bump or void detection, and 3D optical surface profiling. The machine is capable of measuring features as small as 20 nanometers with an accuracy of better than one nanometer. In addition, this tool is capable of handling up to 12-inch wafers and can achieve testing speeds up to 10,000 tests per minute. 7700 includes a variety of image-based testing capabilities, such as parametric testing, die inspection, and defect imaging. Parametric testing is able to identify performance changes due to temperature, voltage, and other environmental factors. The die inspection capability is used to detect structural defects, yield issues, and process variations on the wafers. The defect imaging capability is used to detect non-visible defects and identify contaminants and particles. For utmost accuracy, KLA / TENCOR 7700 offers Advanced Colour Variation 2.0 (ACV2.0) imaging. ACV2.0 integrates NIR (near-infrared) imaging and advanced colour analysis to quickly and accurately measure complex colour transitions between different layers. With this technology, the asset is able to detect colour transitions or anomalies, from pixel to pixel, that may otherwise be missed. KLA 7700 is controlled by the COMNET-I programmable software, which allows for quick and easy programming of wafer specs. Utilizing industry-standard LIMS, worksheets, and scalable solutions, the model can connect to MES systems, reduce manual programming and scripting, and provide process control data with statistical integrity in real-time. For factory floor testing and inspection, TENCOR 7700 is capable of integrating into the production line. With modular software packages, the equipment can be customized to meet individual customer requirements such as automated recipes, customized job processing and controlled factory settings. Thus, the system ensures that each wafer is analyzed accurately and efficiently in terms of both measurement and yield.
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