Used KLA / TENCOR 7700 Surfscan #77361 for sale
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ID: 77361
Wafer Size: 8"
Patterned wafer surface inspection tool, 8"
2 particle collection channels -0.15µm particle sensitivity optics
Multiscan capable
Enhanced periodic feature elimination signal processor
Signal processor circular input polarization
Automatic coordinate registration
HEPA filter package
Non-contaminating robot handler
Random access sender/receiver
Parallel port printer
17 inch color TFT monitor
Vacuum chuck/locator for 200 mm wafers
SECS II interface
HP 1200C colour printer
PC- NFS- network -complies with 89/392/EEC
Electrical supply is AC 110V, 2.8KVA, 50Hz, 1 phase
Specifications
Defect sensitivity 59+/-5 defects on bare wafer coated with PSL of 0.802 µm spheres
Repeatability sigma/X X 100 less than or equal to 1.5% on a bare wafer Coated with 500 or more PSL of 0.802µm standard (10 times)
Particles inside equipment. Number of particles >=0.3µm less than or equal to 13 added to wafer after 25 load and measurement cycles.
No transfer error for 100 transfers
Throughput: 1.5 min/wafer for single scan, 2.5 min/wafer double scan
Environmental particle check- less than or equal to 10 particles>=0.3µm at 1 ft_/min (IDLE)
less than or equal to 35 particles when running.
SECS II - 486DX TYPE PROCESSOR
Specifications 90% capture rate of PSL sphere on patterend wafers as follows:
Bare silicon 0.2µm
Post Poly1 deposition(5-7 KA) 0.4µm
Post CVD W (1.5-2.5 KA) on TiN (85-100% reflectivity) 0.4µm
Post AlSiCu (5-7KA) on CVD W 1.0µm
Post Poly 2 deposition (2.8-3.4 KA) on oxide film 0.4µm
Post nitride (1.1-1.3 KA) 0.3µm
Post AlSiCu Etch 2.0µm
Uptime >98%
Throughput 36 w.p.h
Can be as-is or refurbished to OEM specs.
KLA / TENCOR 7700 Surfscan is an advanced wafer testing and metrology equipment designed for high-precision measurements of the physical and electrical characteristics of semiconductor wafers. This system allows for detailed analysis of a wafer's surface and substructure, which can be used to pinpoint defects. Sample size up to 8 inches are accepted by KLA 7700 Surfscan, with a wide range of sensors available to allow scanning of complex surfaces. The wafer is first loaded into the unit, which provides an environment and controls free from environmental disturbances so results will be as accurate as possible. Its position is then finely adjusted with a set of differential and active devices, while an optical machine enables a high magnification of the sample. TENCOR 7700 Surfscan includes a unique scanning algorithm, allowing it to accurately and quickly capture each sample's characteristics, including flatness, surface displacement, threshold voltage, angle and homogeneity. For measurement of the electrical properties of the wafer, the tool is equipped with a capacitive and conductive force-feedback probe. This probe allows for extremely accurate measurements of a sample's resistance, capacitance and voltage characteristics, including variations in dielectric constant. The measurements are both time and temperature-dependent, enabling 7700 Surfscan to monitor trends in wafer characteristics over time. Furthermore, KLA / TENCOR 7700 Surfscan provides high-speed data analysis and reporting capabilities, with comprehensive software features to facilitate data analysis and results viewing. This software also allows users to design custom parameters and limits, ensuring it will meet their requirements. KLA 7700 Surfscan is essential in any production environment, producing measurements that are far superior to manual techniques. Its accuracy and intuitive user interface make it an invaluable tool for quality control and fault isolation during production.
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