Used KLA / TENCOR 7700 Surfscan #9171318 for sale

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KLA / TENCOR 7700 Surfscan
Sold
ID: 9171318
Wafer Size: 4"
Vintage: 1995
Wafer inspection system, 4" (2) Load stations included 1995 vintage.
KLA / TENCOR 7700 Surfscan is a state-of-the-art wafer testing and metrology instrument, designed for process monitoring in the semiconductor industry. Designed with advanced technologies, KLA 7700 Surfscan enables front-end, back-end and thin-film process characterization. TENCOR 7700 Surfscan easily connects to existing laboratory and fab production systems via Ethernet, providing customers with the ability to rapidly gather data, easily review results, and quickly responsive to process excursions. It includes integrated components such as automated wafer handling, in-situ spectroscopy, automated wafer mapping, and focus ion beam imaging. The Surfscan's hardware and software enables fast data collection and analysis. At the heart of 7700 Surfscan is the scan head. This provides the precision for accurate signal detection in extreme 8" to 200mm wafers or windows, at both low and high pressure with the lightning fast scan speeds of up to 542mm/s. This is made possible by five independently controlled, high-resolution, long-life, 400-micron piezoelectric scanning stages utilising KLA patented Single-Scan™ technology. The other advantage of Single-Scan™ is the exceptional scoring tolerance, which delivers enhanced visibility into wafer layers and composition. Furthermore, KLA / TENCOR 7700 Surfscan is equipped with two simultaneous spectrometers to measure particles as small as three nanometres in the 50-2000nm spectral range. Both spectrometers include a broad range of scan speeds and area scan density, enabling wafer inspection down to the micron scale. The spectrometers also allow the Surfscan to identify particles fast, and accurately classify them as silicon, organic, silicone, or other particles with just one scan. The Surfscan 7700 utilises advanced algorithms to provide an incredibly accurate three-dimensional wafer scan. These algorithms work in tandem with the system's focal ion beam imaging capabilities, providing incredibly detailed topography and contamination mapping of wafers and their thickness or composition. The Surfscan's second algorithm also helps to reduce noise and increase sensitivity, providing customer's with greater reliability. The Surfscan 7700 is a market-leading wafer testing and metrology instrument that provides rapid, accurate, and reliable data. From those handling process excursions to those seeking to further characterise thin-film wafers, KLA 7700 Surfscan provides an essential tool for semiconductor fabrication and testing.
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