Used KLA / TENCOR 7700 Surfscan #9221363 for sale
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ID: 9221363
Wafer Size: 8"
Vintage: 1996
Wafer inspection system, 8"
Automatic handling, 4"– 8"
Patterned / Unpatterned wafer inspection system
Defects maximum resolution 0.15µ
Scan pitch: Max resolution – 12.5m between scan lines
XY Coordinates accuracy within 1%
30 Wafers per hour throughput
High sensitivity on after-etch and high topography application
Uniphase argon ion laser
Low contact wafer chuck, 200mm dia
Blower assembly
1996 vintage.
KLA / TENCOR 7700 Surfscan is a wafer testing and metrology equipment designed to identify and characterize physical defects on semiconductor wafers. With a high-powered microscope and associated image processing software, this system is capable of detecting and measuring even the tiniest features on a wafer. The 7700 unit utilizes state-of-the-art optics and an image processing platform to generate high-resolution images from a wide variety of wafer types. It offers a magnified field of view from 500 to 8,000X, allowing inspection and analysis of 20µm down to 50nm feature sizes. The machine's imaging capabilities and powerful software enable users to perform critical defect detection and classification tasks. KLA 7700 Surfscan is equipped with a wafer-level image stitching capability that allows users to combine images from multiple stages into a single image. This automated process helps minimize false positives and false negatives while allowing for high-throughput wafer testing. TENCOR 7700 Surfscan tool is user-friendly and has an intuitive graphical user interface (GUI) for easy operation. This GUI also allows users to quickly configure imaging parameters, set up conditions for different image processing techniques, select pattern recognition parameters, and configure reporting requirements. The software used in 7700 Surfscan asset offers powerful pattern recognition capabilities. It is able to accurately detect, measure, and analyze various defect types, including anomalies, scattering, roughness, pits and voids. The model also has a defect-attribution capability, which allows users to attribute wafer defects to process sources, giving users detailed information about the underlying root cause. KLA / TENCOR 7700 Surfscan equipment is an efficient, reliable, and cost-effective way to inspect and analyze semiconductor wafers. Its advanced imaging capabilities, image stitching functionality, and powerful pattern recognition algorithms make it an ideal tool for defect-related wafer testing.
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