Used KLA / TENCOR 7700 Surfscan #9234278 for sale

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ID: 9234278
Vintage: 1997
Patterned wafer surface inspection system P/N: 313270 1997 vintage.
KLA / TENCOR 7700 Surfscan is a state-of-the-art wafer testing and metrology equipment used to measure the topography, patterning, overlay, dimensional, and defect characteristics of a device. The system is capable of measuring structures size down to 0.3 micron with high accuracy and precision. It is designed for fully automated scanning and data output while delivering advanced unit software capabilities for image analysis. KLA 7700 Surfscan includes a unique, dual in-situ white light interferometer (WLI) as the main optical imaging element. This WLI helps to provide superior, non-contact, three-dimensional imaging and rapid characterization of nanostructures and patterns, even on continuously patterned surfaces. The machine incorporates several physical attributes which enable exceptional inspection speed and throughput, such as the large detector area (2X) and multiple detection settings. The tool can be equipped with multiple automation modules for various applications: from inspecting a full wafer to patterned or non-patterned surfaces with or without mapping. This enables it to detect and analyze various surface defects and wafer warped structures. Furthermore, the asset includes a large number of user-defined parameters such as inspection speed, high-visual resolution, dynamic focusing, and partial scanning. All of these parameters can be adjusted according to the application. TENCOR 7700 Surfscan also features advanced software capabilities that provides an intuitive user interface as well as versatile analysis and defect classifications tools. The model can also be integrated with other cost-effective controllers and programmable logic controllers (PLCs) for automation and process control. Additionally, it contains built-in high-resolution imaging and local region optimization (LRO) capabilities which can increase the overall equipment accuracy and uniformity of results. In summary, KLA 7700 is one of the best metrology and wafer detection systems available in the market today. Its unique features such as the dual in-situ WLI, multiple detection settings and automation modules, advanced software capabilities, integrated programmable logic controllers (PLCs), and local region optimization (LRO) capabilities make it a reliable and cost-effective solution for testing and analyzing a wide range of wafer surface characteristics.
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