Used KLA / TENCOR 7700 #9377288 for sale
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ID: 9377288
Wafer Size: 8"
Vintage: 1995
Defect measurement system, 8"
1995 vintage.
KLA / TENCOR 7700 wafer testing and metrology equipment is a versatile, high-performance system that provides efficient testing and metrology of semiconductor devices. It is designed to provide efficient and accurate metrology for a variety of devices, including transistor structures, critical dimensions, dopant concentration, and contaminant testing. The unit is capable of testing wafers up to 18 inches in diameter with up to eight chambers. KLA 7700 machine is designed with an integrated, automated Automatic Wafer Handler (AWH) that allows for efficient, reliable testing of a variety of device geometries. The tool can accommodate a wide array of test measurements, encompassing optical and electrical analysis in both stand-alone and modular configurations. The asset's VersaMetric™ Feature Extractor software allows researchers to easily extract feature information and visualize the results through customizable graphical interface screens. TENCOR 7700 model uses a proprietary, advanced deep ultraviolet (UV) light source for its measurements. This light source is adjustable in order to account for different device behaviors, providing accurate data collection even when measuring at low or high temperatures. The equipment's Focus Variation option also allows for calibration of the beam spot size to accommodate different device geometries. For in-line analysis, 7700 system uses a non-contact capacitive measurement sensor, which is capable of detecting extremely small differences in conductive materials. This feature enables the unit to rapidly test wafers for both electrical and structural defects, allowing for detection of subtle structural variations or device degradation over time. Overall, KLA / TENCOR 7700 machine provides a wide range of testing and metrology solutions for semiconductor devices. It utilizes a variety of advanced features, such as the VersaMetric™ Feature Extractor software and the Focus Variation option, to ensure highly accurate and efficient testing. The tool's non-contact capacitive measurement sensor enables in-line analysis and detection of small defects, improving the accuracy of the asset's results.
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