Used KLA / TENCOR 7700M Surfscan #293793013 for sale

KLA / TENCOR 7700M Surfscan
ID: 293793013
Wafer inspection system.
KLA / TENCOR 7700M Surfscan is a state-of-the-art wafer testing and metrology equipment for application defects and process control in semiconductor manufacturing. It is ideally suited for advanced process nodes such as 7 nm, 10 nm, and 12 nm technology nodes and materials as diverse as poly-silicon, Gallium Arsenide, and germanium. At the core of the 7700M is its unique and powerful optical measurement system, which utilizes strobe and standard illumination to capture detailed images of any surface, even severely warped surfaces. Its 5x magnification and low survey range of +/- 25 μm enable accurate characterization of tiny features such as protrusion patterns on chips, and its built-in quality metric allows it to flag any device not meeting expected specifications. In addition to imaging, the 7700M features a powerful step and repeat metrology unit which enables automated mapping of features on a wafer. It utilizes advanced optics and dynamic voltage contrast imaging (DVCI) to quantify depth, radius, and sidewall angle profiles with unmatched accuracy, even across warped surfaces. It's 7nm resolution, coupled with its advanced 2-axis stage, allows for mapping of the entire wafer with great accuracy and speed. The 7700M also features a variety of other tools to ensure quality and process control. Its high-speed, precise localization, scan sequencing, and pattern review capabilities enable it to rapidly detect defects and quickly identify solutions. Its fully automated machine reconfiguration capability also allows users to quickly and easily re-calibrate, making it well-suited for a variety of complex requirements. Finally, the 7700M is designed for ultra-low contamination processes, and is compliant with the toughest industry standards. Its high-accuracy optical filters, air bearing stages, and ultra-pure environment allow users to work with the latest technologies without the worry of false results or contamination. All in all, KLA 7700M Surfscan is an extremely powerful and reliable wafer testing and metrology tool, and its robust feature set and high performance make it the ideal solution for advanced process nodes and diverse materials.
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