Used KLA / TENCOR 7700M Surfscan #59524 for sale
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Wafer Size: 8"
Inspection system, 8" Currently de-installed 208 V, 200 A, 2 Ph, 60 Hz 1997 vintage.
KLA / TENCOR 7700M Surfscan is a state-of-the-art wafer testing and metrology equipment for semiconductor manufacturers. It utilizes both optical and electrical scanning technologies to perform wafer testing, from single die tests to full wafer flatness measurements, on a variety of substrates. The system also includes advanced defect detection and classification. The unit includes a large, automated 7.7' by 11.2' stage that utilizes a precise X-Y-Theta alignment machine. A programmable Z-axis ensures precise, low-force contact between the electrostatic chuck and the wafer, while a powerful vision subsystem allows real-time alignment with the wafer chuck. A high-resolution camera identifies alignment targets, ensuring accuracy and repeatability across the entire wafer. The tool's optical moiré asset uses a variable-angle laser line generator to quickly and accurately measure surface profile, flatness, and other critical surface characteristics. It uses a field of view of up to 5˚ x 37.5˚, and is capable of measuring flats in depths ranging from less than 0.1µm to greater than 7.0µm with accuracy better than 0.3µm. For wafer testing, KLA 7700M Surfscan is equipped with a suite of advanced electrical test probes for contact-based testing and characterization. The probes feature a patented, nanometer-precision alignment technology, and are capable of testing current leakage, resistance, inductance, and capacitance in multiplexed contact and noncontact modes. Finally, TENCOR 7700M Surfscan offers advanced wafer defect identification, classification, and analysis. Defects are detected using both SEM and AFM techniques, and defect types are classified in real time. The model also includes the software needed to carry out complex defect analysis, including automated contour tracing and particle identification. Overall, 7700M Surfscan provides semiconductor manufacturers with an extremely powerful, yet highly accessible, wafer testing and metrology platform. Its combination of advanced optical and electrical scanning technologies, precise alignment capabilities, and defect analysis make it an ideal tool for ensuring the quality and reliability of today's highly complex semiconductor systems.
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