Used KLA / TENCOR 7700M Surfscan #9313795 for sale
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ID: 9313795
Wafer Size: 8"
Vintage: 1995
Wafer inspection system, 8"
Model no: 313246
Display monitor
Keyboard and trackball
(2) Cassette plates
Wafer transfer robot
Chuck, 8"
JDS UNIPHASE 2214-30SL Laser
Pre-aligner
ADC Board
Motor lamp drive board
Power drawer box
External fan
Exhaust line
Computer:
IDE Control board
SECS Port
CPU Board
CPU Parallel port
Hard Disk Drive (HDD)
PSF Control board
(2) Motor control boards
Interface board
PFE Board
Motor controller board
Power supply: 208 V, 20 A, 60 Hz, 2 Phase
1995 vintage.
KLA / TENCOR 7700M Surfscan is a high-performance wafer testing and metrology equipment designed for the semiconductor industry. The system's advanced optical, imaging, and automated measurement functions enable it to quickly measure and analyze the critical parameters of a wafer, as well as its topographic shape. KLA 7700M Surfscan enables its users to reliably analyze and inspect wafers with high levels of accuracy and repeatability. At its core, TENCOR 7700M Surfscan utilizes a patented scanning mechanism for wafer mapping. This unit uses a linear array of low-noise, 16-bit linear CCD cameras that are horizontally arranged on the machine's scanning stage. These cameras measure the electrical properties of the wafer, such as oxide thickness, as well as its topography. The tool's highly integrated substrate autofocus feature allows for precise testing in seconds. 7700M Surfscan has superior optics, allowing it to make fast, accurate 3D measurements of wafer surface topography. It offers up to six times higher precision compared to conventional 2D systems, and also provides true color imaging with 4x zoom and 5 micron pixel size. KLA / TENCOR 7700M Surfscan utilizes a specialized Software Automation Suite that automates wafer inspection and patterning tasks. It provides users with a single point of entry for viewing and controlling data from the asset. This software streamlines operations and efficiently guides operators through each step of the process. What additionally makes this model stand out is its Web Automation Server, which includes multiple tools for database synchronisation and script execution. This helps to ensure seamless communication with the equipment's data management-related software, as well as other host systems within the factory. KLA 7700M Surfscan is an intuitive and cost-effective system, capable of providing an enhanced level of accuracy and repeatability on wafer testing and metrology projects. With its powerful combination of sophisticated scanning optics, automated measurement functions, and user-friendly software, the unit is an ideal choice for wafer testing and metrology projects in the semiconductor industry.
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