Used KLA / TENCOR / ADE 7600 Surfscan #9410326 for sale

ID: 9410326
Vintage: 1995
Particle inspection system Non-functional 1995 vintage.
KLA / TENCOR / ADE 7600 Surfscan is a state of the art automated wafer testing and metrology equipment that offers versatile and advanced applications for semiconductor measurement, inspection and yield enhancement. The system utilizes advanced wafer Inspection, Metrology, Electrical Testing, OBIRCH, Advanced Defect Classification and Automated Defect Review capabilities to enable the highest levels of defect detection and classification. Powered by cutting-edge algorithms, the unit provides maximum yield and productivity with 500x the throughput of previous systems. KLA 7600 Surfscan utilizes a unique three-dimensional optical collection technique that is optimized for through-wafer optomechanics. It provides unmatched metrology resolution, enabling advanced metrology and depth profiling analysis that provides real-time, cross-wafer comparability. This also allows for an effective comparison of etch processes for process control and troubleshooting. The advanced defect classification engine of the machine incorporates a comprehensive library of defect signatures and characteristics, providing for automated defect typing, accurate false-positive detection, and characterization of variations. Additionally, it is capable of defect classification of critical dimensions (CDs) such as via, contact, line-width, and depth. ADE 7600 Surfscan also includes a powerful Automatic Defect Review (ADR) solution that enables advanced defect review operations, including defect clustering and yield performance analysis, as well as integrated classification engine and OBIRCH. This provides the highest levels of productivity and quality control across a wide range of applications. The tool's comprehensive hardware and software package includes a comprehensive hardware library and advanced application platform that is flexible enough to meet all of the customer's needs. Additionally, it features automated remote operation, networkable databases and compatibility with various CAD systems. The asset supports both 200mm and 300mm wafer sizes, and its compact design uses minimal space, making it highly cost effective for deployment. In conclusion, 7600 Surfscan is one of the most advanced wafer testing and metrology solutions available. Its advanced metrology and defect detection capabilities, combined with its wide range of hardware and software options, provide the highest throughput and accuracy levels for maximum yield and productivity.
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