Used KLA / TENCOR / ADE Ultrascan 9600FA #9181889 for sale
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ID: 9181889
Vintage: 1998
Wafer measurement system
Resistivity capability: 1.0 Ω-cm to over 100 Ω-cm (Up to 90 Ω-cm for DBH)
E+ Station
1998 vintage.
KLA / TENCOR / ADE Ultrascan 9600FA is an integrated wafer testing and metrology equipment that helps to improve the quality of semiconductors. This system features an advanced optical metrology platform that enables precise non-contact measurement of the topography and surfaces of wafers, die, and films. KLA Ultrascan 9600FA offers fast, accurate measurements and high throughput, enabling users to quickly and accurately assess wafer characteristics. ADE Ultrascan 9600FA combines highly automated wafer probing and accurate non-contact optical metrology in a single integrated platform. This unit is equipped with 6148 optical probes that can be precisely positioned over the wafer surface to measure die parameters, as well as optical metrology that is capable of nanometer-level resolution. In addition to its probing and optical capability, TENCOR Ultrascan 9600FA features a wafer handling subsystem that enables fast, robust movement of wafers on the machine's XY stage to enable efficient sample processing. Ultrascan 9600FA is powered by KLA ImageMap technology, which allows for enhanced accuracy in the measurement of surface topography. This tool's high resolution enables the capture of extremely fine detail and high-intensity features, making it an ideal choice for the inspection of die-level features. The asset features automated 3D imaging to easily capture topography data from a wide variety of substrates. KLA / TENCOR / ADE Ultrascan 9600FA's analysis capabilities include fast Fourier transform (FFT) as well as patented technology for feature shape and form measurements. FFT analyzes the frequency and intensity of features on the wafer surface and allows for the identification of features, while feature shape and form measurements allow for more accurate measurements of small features and processes. In addition to its powerful optical and metrology capabilities, KLA Ultrascan 9600FA is also equipped with a built-in controller, GPI/O, and a user friendly software package that allows users to customize measurements and analysis. This model is capable of measuring a wide variety of parameters such as step height, WAT roughness, and line spread functions. ADE Ultrascan 9600FA is an essential tool for ensuring quality in the semiconductor industry and offers great value for customers.
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