Used KLA / TENCOR AIT 1 #293751594 for sale

KLA / TENCOR AIT 1 SURFSCAN is a fully automated metrology solutions platform designed for testing and metrology applications in the semiconductor industry. This equipment offers precise, repeatable measurement of wafer characteristics such as patterning, Overlay, and Line Width. The system uses advanced sensors and a multiple mutual registration technology to capture precise measurements and data points from a range of substrates. Surfscan AIT 1 provides precise non-contact scanning of substrates with high resolution, repeatability, and accuracy. The unit supports the measurement of various substrates including silicon wafers, flat panels, LCDs, organic and organic-inorganic hybrid substrates. The platform features modular design and is optimized for rapid throughput and low cost-per-measurement. This machine is capable of processing a wide range of wafer sizes and provides ultimate protection with an integrated subwavelenght imaging board review station. The automated process enables precise, repeatable data collection with a wide-field optical imaging tool, an Overlay Diagnostic asset, and other measurement technologies depending on the application. Its integrated shape recognition and classification capabilities enable precise, repeatable curve measurements along with contour measurements, top-down surface imagery, and reflection inspection for glyphs, defects and other types of feature. To process multiple data sets at a time, the AIT 1 model has an automated profile extraction module that can extract features such as process windows, widths, and linewidths. By integrating this equipment, operators have the ability to accurately determine critical characteristics of a device or structure quickly and efficiently. For example, the high speed Overlay registration system is capable of processing up to 200 wafers per hour. This is beneficial for end users who are in need of measurable data quickly and frequently. As robust and as powerful as KLA AIT 1 SURFSCAN unit is, it also possesses a great deal of flexibility. Optics can be easily changed for a variety of tasks and the machine is equipped with multiple configuration abilities for process windows, thresholds, measurement, repeatability, and other important parameters. All of these features, along with its high-quality automated metrology, make Surfscan AIT 1 an attractive option for semiconductor manufacturers.