Used KLA / TENCOR AIT 1 #9214537 for sale
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ID: 9214537
Wafer Size: 8"
Vintage: 1997
Advanced inspection system, 8"
1997 vintage.
KLA / TENCOR AIT 1 is a wafer testing and metrology equipment designed to improve the quality and yield of semiconductor chips. The system was developed by KLA, a leading provider of wafer inspection and metrology products. KLA AIT 1 unit is an automated, non-contact machine designed to measure physical and electrical parameters across the entire wafer surface. The tool combines three metrology techniques in one platform: Broadband Reflectometry (BBR), 3D Surface Topography (3DST), and Electron Beam Induced Current (EBIC). BBR is used to measure layer thicknesses, interface widths, and depths, over the entire wafer surface. This enables manufacturers to control dielectric gap thickness and uniformity, as well as characterization of photoresist layer profiles. 3DST utilizes lasers to measure the height profile across the entire wafer, allowing manufacturers to identify irregularities in the wafer surface. EBIC uses electrons to detect any shorts or opens across the wafer. This helps detect any process defects such as gate oxide shorts or processing variations. The asset also includes a software package for analyzing the collected data. It includes a suite of tools for measuring various parameters over the entire wafer surface. The software allows the user to set thresholds and other options to customize the model to their specific application. It also provides reporting functionality to quickly review results. Additionally, the equipment's user interface is intuitive and user friendly, making it easy to set up, adjust, and monitor the system. TENCOR AIT 1 unit is ideal for a wide range of applications in the semiconductor industry, such as integrated circuit quality control, process characterization, yield improvement, and process development. Its non-contact measurement techniques and advanced software package enable manufacturers to increase accuracy and reduce cost.
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