Used KLA / TENCOR AIT Fusion XUV #9250962 for sale
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ID: 9250962
Wafer Size: 12"
Vintage: 2004
Darkfield wafer inspection system, 12"
Handler:
(2) Load ports: ASYST Isoport with FOUP
BROOKS Robot and controller
Main body:
Light source: 90mW UV Laser
Function: DBS, SE
Component: Pillar and blower
2004 vintage.
KLA / TENCOR AIT Fusion XUV is an advanced wafer testing and metrology system designed to deliver precise and accurate results with maximum efficiency. The system combines two essential instruments - a Metrology SEM (Scanning Electron Microscope) and a Wafer Inspection Tool. The Metrology SEM offers ultra-high resolution imaging and non-destructive sub-surface testing capabilities. This enables users to perform detailed micro-analysis and metrology measurements of the wafer surface. The Wafer Inspection Tool utilizes an X-ray scattering technique, which provides fast and sensitive measurements of the surface of the semiconductor wafer. Additionally, the Fusion XUV can be outfitted with a wide variety of custom fixtures and stage motions. The Fusion XUV has numerous features that make it an ideal wafer testing solution. It offers advanced algorithms that facilitate precise measurements and analysis, as well as high-resolution imaging that provides fast and reliable results. Additionally, its reliable calibration provides accurate results, even when testing a wide variety of wafer types. Overall, KLA AIT Fusion XUV provides a powerful and reliable solution for wafer testing and metrology. Its combination of advanced imaging and metrology tools gives it exceptional capabilities for detailed analysis and precise measurements. In addition, it is user-friendly and offers reliable results, even when dealing with highly complex wafer surfaces. The Fusion XUV also has superior turnaround times compared to other testing solutions, making it a great choice for fast-paced industries and research labs.
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