Used KLA / TENCOR AIT Fusion #9273897 for sale
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ID: 9273897
Wafer Size: 8"
Vintage: 2003
Inspection system, 8"
Dual open cassette
BROOKS AUTOMATION Robot and aligner
2003 vintage.
KLA / TENCOR AIT Fusion is an advanced wafer testing and metrology equipment that provides complete wafer inspection solutions. The system is designed to evaluate a wide range of wafer-level parameters, including topography, electrical and structural properties. It combines multiple accurate optical metrology techniques with advanced software to deliver highly reliable and accurate measurement levels. KLA AIT Fusion unit is made up of a wafer platform, an imaging machine and measurement components. This allows it to simultaneously measure the topography and physical characteristics of wafers up to 200mm in diameter. These measurements can then be used to detect surface and internal defects and assess yield, process uniformity, and wafer geometry. The tool utilizes an advanced optical asset which is used to capture images of different surfaces of the wafers at different magnifications. By combining high resolution imaging and sophisticated algorithms, the model's imaging equipment can detect and analyze imperfections such as surface and subsurface defects on the wafer that traditional automated inspection methods cannot detect. The system can also be used to measure electrical properties of the wafer with a wafer prober in a non-contact and non-invasive manner. The wafer prober is specifically designed for automated inspection and characterization of wafer-level features. The wafer prober allows users to measure the impedance, capacitance, resistance, leakage current, power dissipation, and other electrical parameters of the wafer in different contexts. The unit also offers a suite of software tools for data analysis and processing. These include analysis functions such as automated processing of profile data, interpretation, custom report generation and data mining. The software can also be used to get up-to-the second trend analysis and yield optimization data. TENCOR AIT Fusion machine is widely used for both research and production in the semiconductor industry. It provides users with a powerful and versatile tool for wafer testing and metrology, allowing them to quickly and accurately analyze the surface and electrical characteristics of modern wafers with unparalleled accuracy and reliability.
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