Used KLA / TENCOR AIT I #9173474 for sale

ID: 9173474
Vintage: 1997
Darkfield system Single open handler, 8" 1997 vintage.
KLA / TENCOR AIT I is a wafer testing and metrology equipment designed to provide accurate results for complex semiconductor devices. It uses advanced software algorithms, test pattern libraries, and integrated test platforms to automate and optimize testing processes. The system assists in the development of wafers and substrates for fabrication, and qualifies both stable and dynamic testing flows. KLA AIT I incorporates advanced techniques of advanced imaging and reflectivity measurements to detect minor imperfections or manufacturing errors, during or after the device fabrication. It also features an optical microscope, a surface charge analyzer, and a HDTV/SEM microscope to characterize the new materials or curved geometries. It can be configured to measure parameters such as contour, thickness, height, and crystal lattice dimension. TENCOR AIT-I also integrates high-throughput image analysis—including edge detection and texture analysis—to provide rapid and quantitative metrology data. This feature helps reduce process cycle times and improves wafer yields. KLA AIT-I unit further allows for real-time monitoring of photomask defects, defects in the lithography layer, and test responses in incoming wafers. Additionally, semi-automatic alignment and registration functions are available to streamline mask-to-mask comparisons. This machine also offers compatibility with a diverse range of wafer materials, from stacking to SOI substrates. Additionally, KLA / TENCOR AIT-I facilitates cross-platform communication with various backend process steps, such as deposition, lithography, etching, and metrology. It provides metrology data during each process step for both online and offline quality control. AIT I provides a suite of powerful software tools for comprehensive data analysis. These tools enable drill-down and resistivity mapping, along with overall probability distribution of test results. In addition, it can enable the integration of multiple test software packages used across different operations within a single test environment. AIT-I is designed to support advanced applications such as the development of fine line patterns used in memory, logic, and embedded devices. Its tight control on testing accuracy and repeatability further ensures better wafer yields and reduced fail rates during high-volume production.
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