Used KLA / TENCOR AIT II #9281087 for sale

KLA / TENCOR AIT II is a state-of-the-art wafer testing and metrology equipment. It offers high throughput and accuracy for various types of wafer-level inspection tasks. With its advanced optics, high accuracy motion control, and software, KLA AIT II provides fast, reliable metrology and testing for patterns printed on wafers. TENCOR AIT II is a hybrid system combining full-field imaging capabilities and scanning electron microscopy (SEM). It is designed to measure the geometrical shape, size, position, distribution, and layer thickness of patterns printed on the wafer's surface. The unit is capable of testing at a rate of 5000-10000 Wafers per hour (WPH). AIT II has an integrated optical inspection module with up to four cameras. The cameras are used to capture the wafer image and measure the pattern size. After the pattern is measured, it is compared against a set of standards to determine if it meets the desired process specification. The machine's software also offers various options for analysis, such as line width measurement, sheet resistance measurements, and grain size measurements. This software can also be used to define defect parameters and control critical dimensions. Additionally, the tool features an integrated scanning electron microscope (SEM) which is used to measure the topography of the wafer. This helps to ensure optimal process control, as well as to understand any process failures. The SEM also accurately detects the presence of any contaminants or of metal films present on the processed wafer surface. Overall, KLA / TENCOR AIT II offers state-of-the-art capabilities for wafer testing and metrology. With its high accuracy motion control systems, advanced optics, pattern analysis software, and integrated scanning electron microscope, KLA AIT II is an excellent choice for process control and defect detection.