Used KLA / TENCOR AIT UV+ #9228059 for sale

KLA / TENCOR AIT UV+
ID: 9228059
Vintage: 2004
Darkfield inspection system 2004 vintage.
KLA / TENCOR AIT UV+ is a wafer testing and metrology equipment designed to provide analysis and feedback for process control in the fabrication of semiconductor devices. It utilizes advanced UV imaging technologies to generate high-resolution images for precise analysis. The system provides a broad range of metrology capabilities that support a wide range of device product sizes from 1.5-inch up to larger 12-inch wafers. The UV+ utilizes a multi-camera unit utilizing both charge-coupled device (CCD) and high-power ultraviolet (UV) lighting in low temperature deposition processes. This combination of cameras allows for imaging of features down to 0.36µm and can be configured for 2D or 3D imaging modes. The machine can be used to measure a number of parameters, including topography, stress, geometries, overlay, overlay registration, reflectance levels, contact resistivity and material layers. The tool has automated recognition tools and prober software for fully automated analysis and analysis. The software for the asset allows for custom operations to be programmed to perform specific tasks for wafer testing and analysis. The model has advanced wafer inspection capabilities, using specialized algorithms to detect pattern defects including roughness, voids, pattern shift, bridging, and missing features. It can also inspect a range of advanced materials and advanced circuitry, such as carbon nanotubes and non-volatile memory devices. Analysis methods can also be used to detect and measure other material related features such as etch rate, threshold current, transistor characteristics and stacking variance. The equipment has cleaning and handling capabilities that provide improved wafer yield and process control. It also has built-in handling processes which automate wafer handling. The system has features like programmable target ID to support advanced logging of fabrication and diagnostic operations. Overall, KLA AIT UV+ is a powerful and comprehensive wafer testing and metrology unit that offers a wide range of capabilities for process control and analysis in advanced semiconductor fabrication. It provides high precision and repeatable measurements with adjustable flexibility to ensure optimal end product quality.
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